Method for checking carrier transport system, vacuum processing device, computer program and computer-readable storage medium

There is provided a method of inspecting a carrier transport system, the carrier transport system comprising: a drive unit for transporting a carrier through a vacuum processing device along a transport path; and a suspension magnet for magnetically holding at least a first portion of the weight of the carrier during transport of the carrier. The method comprises: (i) measuring, with one or more sensors disposed at the carrier, sensor data characterizing transport of the carrier as a function of time or carrier position during transport of the carrier; and (ii) determining, in a computer-implemented process, a root cause of an anomaly in the sensor data. A location of the root cause in the vacuum processing apparatus may be located based on a time of occurrence of the anomaly in the sensor data. The root cause of the anomaly may be determined using a computer-implemented model of the carrier transport system, in particular digital twinning of the carrier transport system. Alternatively or additionally, a trai