Liquid metal supply assembly

There is described a liquid metal supply assembly for use in an EUV light source, the assembly comprising: a) a first reservoir configured to maintain liquid metal at a first temperature; b) a liquid metal delivery conduit in fluid communication with the first reservoir, wherein the liquid metal del...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BESEMS DAVID, RIJPMA ALBERT PIETER, KERSSEMAKERS SANDER, DERKS SANDER CATHARINA REINIER
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS TESTING X-RAY TECHNIQUE
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