Liquid metal supply assembly

There is described a liquid metal supply assembly for use in an EUV light source, the assembly comprising: a) a first reservoir configured to maintain liquid metal at a first temperature; b) a liquid metal delivery conduit in fluid communication with the first reservoir, wherein the liquid metal delivery conduit is configured to be at a second temperature different from the first temperature; c) a temperature sensor configured to measure a temperature of the liquid metal delivery conduit to detect a flow of liquid from the first reservoir through the liquid metal delivery conduit via a change in temperature of the liquid metal delivery conduit. An EUV light source, a method of detecting the flow of a liquid metal and uses thereof are also described. 描述了一种用于在EUV光源中使用的液态金属供应组件，所述组件包括：a)第一贮存器，所述第一贮存器被配置成将液态金属保持处于第一温度；b)与所述第一贮存器流体连通的液态金属输送导管，其中所述液态金属输送导管被配置成处于不同于所述第一温度的第二温度；c)温度传感器，所述温度传感器被配置成测量所述液态金属输送导管的温度，以经由所述液态金属输送导管的温度的变化来检测从所述第一贮存器通过所述液态金属输送导管的液体的流动。还描述了EUV光源、检测液态金属的流动的方法及其用途。