Multi-zone gas tank block surface heater

A gas conditioning device includes a substrate block including one or more fluid ports on an upper surface of the substrate block. The substrate block has a first length along the sidewall. The substrate block includes an inlet port at a first end and an outlet port at a second end. A flow channel extends within the substrate block between the inlet port and the outlet port and is in fluid communication with the one or more fluid ports. At least one heater strip is located on a sidewall of the substrate block. The at least one heater strip extends between the first end and the second end and controls the internal temperature within the region of the substrate block. The region has a second length that is less than or substantially equal to the first length. 一种气体调节装置包含基板区块，其包含位于基板区块的上表面上的一或多个流体端口。基板区块沿着侧壁具有第一长度。基板区块包含位于第一端的入口端口以及位于第二端的出口端口。流动通道在入口端口以及出口端口之间的基板区块内延伸，且与一或多个流体端口流体地连通。至少一个加热器条位于基板区块的侧壁上。该至少一个加热器条在第一端和第二端之间延伸，且控制基板区块的区域内的内部温度。该区域具有第二长度，其小于或基本上等于第一长度。