Inspection device

An inspection apparatus is disclosed. The inspection apparatus includes: a light source that radiates a light beam; a first lens disposed between the inspection object and the light source, the first lens having a first opening defined therethrough in a first direction; a second lens disposed betwee...

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Hauptverfasser: GAO HUILAN, SANGU AKIFUMI, SON JAE-MIN, HAHN SEI KWANG
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Sprache:chi ; eng
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creator GAO HUILAN
SANGU AKIFUMI
SON JAE-MIN
HAHN SEI KWANG
description An inspection apparatus is disclosed. The inspection apparatus includes: a light source that radiates a light beam; a first lens disposed between the inspection object and the light source, the first lens having a first opening defined therethrough in a first direction; a second lens disposed between the inspection object and the first lens, the second lens having a second opening defined therethrough in the first direction to overlap the first opening; an inspection unit disposed to be spaced apart from the inspection object and including an incident portion disposed to overlap the first opening and the second opening on a plane, the first lens interposed between the inspection unit and the inspection object; and a driving unit that adjusts a distance between the first lens and the inspection object or a distance between the second lens and the inspection object. 公开了检查设备。检查设备包括:光源,该光源辐射光束;第一透镜,该第一透镜设置在检查对象与光源之间,具有在第一方向上穿过第一透镜限定的第一开口;第二透镜,该第二透镜设置在检查对象与第一透镜之间,具有在第一方向上穿过第二透镜限定以与第一开口重叠的第二开口;检查单元,该检查单元设置成与检查对象间隔开
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The inspection apparatus includes: a light source that radiates a light beam; a first lens disposed between the inspection object and the light source, the first lens having a first opening defined therethrough in a first direction; a second lens disposed between the inspection object and the first lens, the second lens having a second opening defined therethrough in the first direction to overlap the first opening; an inspection unit disposed to be spaced apart from the inspection object and including an incident portion disposed to overlap the first opening and the second opening on a plane, the first lens interposed between the inspection unit and the inspection object; and a driving unit that adjusts a distance between the first lens and the inspection object or a distance between the second lens and the inspection object. 公开了检查设备。检查设备包括:光源,该光源辐射光束;第一透镜,该第一透镜设置在检查对象与光源之间,具有在第一方向上穿过第一透镜限定的第一开口;第二透镜,该第二透镜设置在检查对象与第一透镜之间,具有在第一方向上穿过第二透镜限定以与第一开口重叠的第二开口;检查单元,该检查单元设置成与检查对象间隔开</description><language>chi ; eng</language><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES ; MEASURING ; MEASURING ELECTRIC VARIABLES ; MEASURING MAGNETIC VARIABLES ; PHYSICS ; TESTING</subject><creationdate>2024</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20240802&amp;DB=EPODOC&amp;CC=CN&amp;NR=118425187A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20240802&amp;DB=EPODOC&amp;CC=CN&amp;NR=118425187A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>GAO HUILAN</creatorcontrib><creatorcontrib>SANGU AKIFUMI</creatorcontrib><creatorcontrib>SON JAE-MIN</creatorcontrib><creatorcontrib>HAHN SEI KWANG</creatorcontrib><title>Inspection device</title><description>An inspection apparatus is disclosed. 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subjects INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
title Inspection device
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