Inspection device

An inspection apparatus is disclosed. The inspection apparatus includes: a light source that radiates a light beam; a first lens disposed between the inspection object and the light source, the first lens having a first opening defined therethrough in a first direction; a second lens disposed between the inspection object and the first lens, the second lens having a second opening defined therethrough in the first direction to overlap the first opening; an inspection unit disposed to be spaced apart from the inspection object and including an incident portion disposed to overlap the first opening and the second opening on a plane, the first lens interposed between the inspection unit and the inspection object; and a driving unit that adjusts a distance between the first lens and the inspection object or a distance between the second lens and the inspection object. 公开了检查设备。检查设备包括：光源，该光源辐射光束；第一透镜，该第一透镜设置在检查对象与光源之间，具有在第一方向上穿过第一透镜限定的第一开口；第二透镜，该第二透镜设置在检查对象与第一透镜之间，具有在第一方向上穿过第二透镜限定以与第一开口重叠的第二开口；检查单元，该检查单元设置成与检查对象间隔开