Device and method for growing monocrystal diamond based on chemical vapor deposition method
The invention belongs to the technical field of single crystal diamond growth, particularly relates to a device and a method for growing single crystal diamond based on a chemical vapor deposition method, and aims to solve the problems that the interior of a growth chamber is inconvenient to automat...
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Patent |
Sprache: | chi ; eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The invention belongs to the technical field of single crystal diamond growth, particularly relates to a device and a method for growing single crystal diamond based on a chemical vapor deposition method, and aims to solve the problems that the interior of a growth chamber is inconvenient to automatically clean, the reliability of long-term production cannot be ensured, a substrate material is inconvenient to uniformly heat and the production cost is low in the prior art. According to the technical scheme, the device comprises a mounting seat, a plurality of heat exchange tubes, a plurality of heat exchange tubes and a plurality of heat exchange tubes, and the two side plates are fixedly mounted at the top of the mounting base, first sliding grooves are formed in one sides of the two side plates, the same lower supporting plate is slidably mounted in the two first sliding grooves, and second sliding grooves are formed in one sides of the two side plates. And moreover, the substrate material can be uniformly h |
---|