Dry vacuum pump
A dry vacuum pump (1) is provided with a purge gas supply path (9). Between an indoor end surface (63) on the fixed side of the pump chamber (6) and a rotor end surface (243) of the roots rotor (24), a minute gap portion capable of maintaining airtightness is formed along an outer peripheral edge po...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | A dry vacuum pump (1) is provided with a purge gas supply path (9). Between an indoor end surface (63) on the fixed side of the pump chamber (6) and a rotor end surface (243) of the roots rotor (24), a minute gap portion capable of maintaining airtightness is formed along an outer peripheral edge portion of the rotor end surface (243), and a larger-area gap portion (94) surrounded by the minute gap portion is formed. Purge gas is supplied to the gap portion (94) via the purge gas supply path (9). The roots rotor (24) rotates with the purge gas retained in the gap portion (94), and dilutes the suction gas in the vicinity of the indoor end surface (63) of the pump chamber (6). Problems such as deposition and accumulation of products on the indoor end surface (63) and corrosion of the indoor end surface (63) and the rotor end surface (243) are suppressed.
干式真空泵(1)具备净化气体供给路径(9)。在泵室(6)的固定侧的室内端面(63)与罗茨转子(24)的转子端面(243)之间沿转子端面(243)的外周缘部分形成有能够维持气密性的微小间隙部分，并形成有由微小间隙部分包围的更大面积的间隙部分(94)。经由净化气体供给路径(9)而将净化气体向间隙部分(94)供给。罗茨转子 |
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