Light source of laser direct writing exposure machine

The invention belongs to the technical field of laser exposure, and particularly relates to a laser direct-writing exposure machine light source which comprises an exposure module, an exposure window is arranged at the front end of the exposure module, a base frame is arranged at the lower end of th...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHU XIAOCHUN, GU HAIXIA, PANG CHAOQUN, TAN JUN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention belongs to the technical field of laser exposure, and particularly relates to a laser direct-writing exposure machine light source which comprises an exposure module, an exposure window is arranged at the front end of the exposure module, a base frame is arranged at the lower end of the exposure module, a regulation and control device is arranged in the base frame, and the regulation and control device is arranged at the lower end of the exposure module; the regulation and control device comprises a placing platform which is arranged on the surface of the base frame. By arranging a first telescopic cover and a second telescopic cover, before exposure, an adjusting rod is started, the adjusting rod drives the first telescopic cover to move downwards, after the adjusting rod moves for a certain distance, a placing platform moves upwards, and finally the placing platform moves into the first telescopic cover, so that a substrate for exposure can be in a dark environment; therefore, the influence of