Micro-LED detection equipment and detection method

The invention discloses Micro-LED detection equipment and a detection method, and belongs to the technical field of Micro-LED detection, and the equipment comprises a motion platform, a laser, an objective lens, a reflector, a collector, a semi-transparent and semi-reflective mirror, a first gray sc...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WANG WEI, ZHANG HAIYU, LI XUANLING, BI HAI, KE LIANBAO
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses Micro-LED detection equipment and a detection method, and belongs to the technical field of Micro-LED detection, and the equipment comprises a motion platform, a laser, an objective lens, a reflector, a collector, a semi-transparent and semi-reflective mirror, a first gray scale camera and a second gray scale camera. According to the scheme provided by the invention, when the reflecting mirror is located at the first position, light emitted after imaging of the objective lens passes through the semi-transparent and semi-reflecting mirror, then enters the first gray-scale camera and the second gray-scale camera, and then is sent to the computer through the image acquisition card; when the reflecting mirror is located at the second position, light emitted after imaging of the objective lens passes through the reflecting mirror and then enters the collector, the collector calibrates a light image through a standard spectrum or chromaticity, and the calibrated light image is sent to the co