Preparation method of two-dimensional TMDCs material based on PECVD method

The invention relates to a preparation method of a two-dimensional TMDCs material based on a PECVD (Plasma Enhanced Chemical Vapor Deposition) method, which comprises the following steps: directly adding an M metal source inorganic salt with the mass fraction of 1-10mg/ml into deionized water, and u...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LI YONGJUN, LI JIYA, LI JUPING, GONG CHENGSHI, ZHANG ZHENGRONG, ZHEN XIAOJUAN, GUO CHENXIAO, LIU HUILING, MENG XUJUAN, LI WEIJIE, WANG GUANGYI, JIANG KAI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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