Rapid arc extinguishing device and method of ion implantation equipment

The invention discloses a rapid arc extinguishing device of ion implantation equipment, the ion implantation equipment comprises an ion source extraction electrode and an extraction power supply, the rapid arc extinguishing device comprises a normally closed high voltage switch used for connecting the ion source extraction electrode and the ion source extraction power supply; the current sensor is used for carrying out current sampling on a high-voltage output line between the ion source lead-out power supply and the high-voltage switch; and the high-voltage switch controller is used for receiving the current sampling result from the current sensor and controlling the high-voltage switch to be switched off for appointed arc extinguishing time when the current sampling result exceeds a judgment threshold value. 本专利申请公开了一种离子注入设备的快速灭弧装置，所述离子注入设备包括离子源引出电极和引出电源，所述快速灭弧装置包括：常闭的高压开关，用于连接所述离子源引出电极和所述离子源引出电源；电流传感器，用于对所述离子源引出电源和所述高压开关之间的高压输出线进行电流采样；及高压开关控制器，用于接收来自所述电流传感器的电流采样结果，并当所述电流采样结果超过判定阈值时，控制所述高压开关断开达指定灭弧时间。