SYSTEM AND METHOD FOR CONTROLLING ELECTROSTATIC CLAMPING OF MULTIPLE PLATES ON A ROTATING DISK

A system and method for controlling electrostatic clamping of a plurality of platen plates on a rotating disk is disclosed. The system includes a semiconductor processing system, such as a high-energy implant system. The semiconductor processing system generates a spot ion beam that is directed to a plurality of workpieces disposed on a rotating disk. The rotating disc comprises a rotating center hub and a plurality of pressing plates. The plurality of pressure plates may extend outwardly from the central hub, and a workpiece is electrostatically clamped to the pressure plates. The central hub provides an electrostatic clamping voltage to each of the plurality of pressure plates. In addition, the plurality of pressure plates may also be rotatable about an axis orthogonal to the axis of rotation of the central hub. The central hub controls rotation of each of the pressure plates. Power connections and communications are provided to the central hub through the spindle assembly. 公开了一种用于控制旋转盘上多个压板的静电夹持的系统和方法。所述系统