Solution-assisted ultra-precision machining method and device for optical crystal

The invention relates to a solution-assisted ultra-precision machining method and device for an optical crystal, and the method comprises the steps: firstly, modifying a to-be-polished surface through plasma, and enabling the surface to be super-hydrophilic; gas and micro liquid drops are mixed to f...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	FANG FENGZHOU, PAN JIYU, LYU PENG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TRANSPORTING
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