Method for analyzing nitrosyl fluoride-containing gas and method for removing nitrosyl fluoride from gas

Provided is a method for analyzing a nitrosyl fluoride-containing gas, whereby the amount of oxygen gas and nitrogen gas contained in a mixed gas containing nitrosyl fluoride and at least one of oxygen gas and nitrogen gas can be accurately and safely quantified. This method for analyzing a gas cont...

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Bibliographische Detailangaben

Hauptverfasser:	IWASAKI JUNPEI, KANAUCHI MASANORI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PHYSICS TESTING THEIR RELEVANT APPARATUS TRANSPORTING
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