Method for analyzing nitrosyl fluoride-containing gas and method for removing nitrosyl fluoride from gas

Provided is a method for analyzing a nitrosyl fluoride-containing gas, whereby the amount of oxygen gas and nitrogen gas contained in a mixed gas containing nitrosyl fluoride and at least one of oxygen gas and nitrogen gas can be accurately and safely quantified. This method for analyzing a gas containing nitrosyl fluoride comprises: a conversion step in which a mixed gas is brought into contact with a reactant capable of reacting with nitrosyl fluoride to produce a nitrogen oxide, and the nitrosyl fluoride is converted into a nitrogen oxide by the reaction between the nitrosyl fluoride and the reactant; a removal step in which the gas after the conversion step is brought into contact with an adsorbent capable of adsorbing nitrogen oxides, and the nitrogen oxides are removed from the gas by adsorption of the nitrogen oxides; and an analysis step for analyzing the gas after the removal step and quantifying the oxygen gas and the nitrogen gas. 提供能够高精度且安全地对含有氧气和氮气中的至少一者和亚硝酰氟的混合气体中所含有的氧气和氮气进行定量的含有亚硝酰氟的气体的分析方法。含有亚