Instrument and method for measuring surface curvature of sample
The invention relates to an instrument for measuring the surface curvature of a sample (8). The instrument comprises a light source (1) and a mask (2), the light source (1) illuminating the mask (2) to produce a light beam (10) incident on the surface of the sample and to form a light beam (20) refl...
Gespeichert in:
Hauptverfasser: | , , |
---|---|
Format: | Patent |
Sprache: | chi ; eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The invention relates to an instrument for measuring the surface curvature of a sample (8). The instrument comprises a light source (1) and a mask (2), the light source (1) illuminating the mask (2) to produce a light beam (10) incident on the surface of the sample and to form a light beam (20) reflected by the sample. According to the invention, the mask (2) comprises a transparent background and an opaque pattern (14) arranged in a predetermined position, the total surface area of the opaque pattern (14) of the mask being smaller than the surface area of the transparent background. The apparatus comprises an imaging system (5), a camera (6) and an image processing system, the imaging system (5) and the camera (6) being adapted to form an image (32) of the mask by reflection on the sample (8), the image processing system being adapted to process the mask image (32) by reflection on the sample surface in order to derive therefrom the radius of curvature of the sample (8).
本发明涉及一种用于测量样品(8)的表面曲率的仪器。该仪器包括光源(1)和掩 |
---|