Method for producing p-type single crystal silicon

The invention relates to a method for manufacturing p-type single crystal silicon. A method for producing a p-type single crystal silicon by melting a polycrystalline silicon raw material comprising a plurality of polycrystalline silicon chunks, said method comprising a step for producing a p-type s...

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Bibliographische Detailangaben
Hauptverfasser:	EMOTO MIKI, ONODA TORU, ASANO TAKUYA, SAEKI KOICHI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR CHEMISTRY COMPOUNDS THEREOF CRYSTAL GROWTH INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	The invention relates to a method for manufacturing p-type single crystal silicon. A method for producing a p-type single crystal silicon by melting a polycrystalline silicon raw material comprising a plurality of polycrystalline silicon chunks, said method comprising a step for producing a p-type single crystal silicon having a resistivity of 10000 [Omega] cm or more without adding a dopant during melting of the polycrystalline silicon raw material, and a step for producing a p-type single crystal silicon having a resistivity of 10000 [Omega] cm or more as the polycrystalline silicon raw material, a polycrystalline silicon raw material is used in which the total concentration of donor elements present in the main body of the polycrystalline silicon raw material is Cd1 [ppta], the total concentration of acceptor elements present in the main body of the polycrystalline silicon raw material is Ca1 [ppta], and the total concentration of donor elements present on the surface of the polycrystalline silicon raw mat