Electrostatic chuck component, electrostatic chuck device, and method for manufacturing electrostatic chuck component

An electrostatic chuck component is provided with: a dielectric substrate provided with a placement surface on which a sample is placed, and having a first support plate and a second support plate stacked in the thickness direction; and an adsorption electrode embedded in the interior of the dielectric substrate, in which a gas flow path is provided between the first support plate and the second support plate, the gas flow path is formed by a recess provided in at least one of the surfaces facing each other and covered by the other surface, and the size in the height direction of the gas flow path is 90-300 [mu] m. The width dimension of the gas flow path is 500 [mu] m or more and less than 3000 [mu] m. 一种静电卡盘部件，其具备：电介质基板，设置有载置试样的载置面且具有在厚度方向上层叠的第1支承板及第2支承板；及吸附电极，嵌入于电介质基板的内部，其中，在第1支承板与第2支承板之间设置有气体流路，该气体流路由设置于彼此对置的面中的至少一个面并被另一个面覆盖的凹槽形成，气体流路的高度方向的尺寸为90μm以上且300μm以下，气体流路的宽度尺寸为500μm以上且小于3000μm。