Capacitor electrode processing method

A processing method of a capacitor electrode comprises the following steps: forming a first electrode, and performing a first processing process on a first oxide layer above the first electrode, wherein the first treatment process is performed using a first process gas comprising ammonia, depositing a high-k dielectric layer over the first oxide layer, forming a second electrode over the high-k dielectric layer, forming a first contact plug electrically connected to the first electrode, and forming a second contact plug electrically connected to the second electrode. 一种电容电极的处理方法，包含形成第一电极、对第一电极上方的第一氧化层进行第一处理工艺，其中第一处理工艺使用包含氨的第一工艺气体来进行、沉积高k介电层于第一氧化层的上方、形成第二电极于高k介电层的上方、形成电性连接至第一电极的第一接触插塞，以及形成电性连接至第二电极的第二接触插塞。