Silicon component surface etching device

The invention provides a silicon component surface etching device, which comprises an etching groove, an etching tool and a power transmission mechanism, and is characterized in that the etching tool comprises two tool plates arranged in parallel and two bearing shafts arranged in parallel, and the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HAN YINGCHAO, TONG JIANKANG, LIANG CUNYE, FAN RONG, MA ZHIJIE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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