Silicon component surface etching device

The invention provides a silicon component surface etching device, which comprises an etching groove, an etching tool and a power transmission mechanism, and is characterized in that the etching tool comprises two tool plates arranged in parallel and two bearing shafts arranged in parallel, and the two bearing shafts are used for supporting a silicon component; the power transmission mechanism comprises a transmission support, a first driving motor, a second driving motor, a connecting rod assembly, a gear set and a contact transmission shaft, the etching tool is installed on the transmission support, the first driving motor drives the whole transmission support to do reciprocating translational motion, and the second driving motor drives the contact transmission shaft to rotate; therefore, oscillation and rotary cleaning of the silicon component in the etching groove are realized. The etching device has the advantages of being good in etching cleaning effect, high in universality, high in production efficien