Fano resonance sensor based on multilayer nitride film structure

The invention belongs to the technical field of nano sensors, and particularly relates to a Fano resonance sensor based on a multi-layer nitride film structure. The Fano resonance sensor based on the multi-layer nitride film structure comprises a coupling prism, a first layer of nitride film, a second layer of nitride film and a third layer of nitride film which are sequentially arranged from bottom to top, the first layer of nitride film, the second layer of nitride film and the third layer of nitride film are made of at least one of a titanium nitride film, a zirconium nitride film, a tantalum nitride film, a hafnium nitride film, a silicon nitride film, an aluminum nitride film, a gallium nitride film and a vanadium nitride film. The Fano resonance sensor is composed of three layers of nitrides, the three layers of nitrides can be prepared through the same deposition technology, the sensitivity is excellent, and the technical problems that in the prior art, a Fano resonance sensor is high in cost, poor in