Circulating purification system and method based on high-purity solid argon detection system

The invention relates to the technical field of solid argon purification, and discloses a circulating purification system and method based on a high-purity solid argon detection system.The purification system comprises an argon source, a primary purifier, a purifier, a vacuum pump set, a liquid argo...

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Bibliographische Detailangaben
Hauptverfasser: YAN YULU, YUKI, HIROMI, WANG XUEQI, LIU YU
Format: Patent
Sprache:chi ; eng
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