Circulating purification system and method based on high-purity solid argon detection system
The invention relates to the technical field of solid argon purification, and discloses a circulating purification system and method based on a high-purity solid argon detection system.The purification system comprises an argon source, a primary purifier, a purifier, a vacuum pump set, a liquid argo...
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Format: | Patent |
Sprache: | chi ; eng |
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