Circulating purification system and method based on high-purity solid argon detection system
The invention relates to the technical field of solid argon purification, and discloses a circulating purification system and method based on a high-purity solid argon detection system.The purification system comprises an argon source, a primary purifier, a purifier, a vacuum pump set, a liquid argo...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention relates to the technical field of solid argon purification, and discloses a circulating purification system and method based on a high-purity solid argon detection system.The purification system comprises an argon source, a primary purifier, a purifier, a vacuum pump set, a liquid argon tank and a solid argon tank; the argon gas source is connected to a gas inlet of the primary purifier through a gas pipeline, and a gas outlet of the primary purifier is simultaneously connected to a gas inlet and a gas outlet of the solid argon tank and a gas inlet of the purifier through gas pipelines; a gas outlet of the purifier is simultaneously connected to gas inlets of the vacuum pump set, the liquid argon tank and the solid argon tank through gas pipelines; a heating resistor is also arranged in the liquid argon tank and is used for gasifying liquid argon; and a gas outlet of the liquid argon tank is connected to a gas inlet of the solid argon tank through the gasification coil pipe and the circulating p |
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