Circulating purification system and method based on high-purity solid argon detection system

The invention relates to the technical field of solid argon purification, and discloses a circulating purification system and method based on a high-purity solid argon detection system.The purification system comprises an argon source, a primary purifier, a purifier, a vacuum pump set, a liquid argo...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: YAN YULU, YUKI, HIROMI, WANG XUEQI, LIU YU
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The invention relates to the technical field of solid argon purification, and discloses a circulating purification system and method based on a high-purity solid argon detection system.The purification system comprises an argon source, a primary purifier, a purifier, a vacuum pump set, a liquid argon tank and a solid argon tank; the argon gas source is connected to a gas inlet of the primary purifier through a gas pipeline, and a gas outlet of the primary purifier is simultaneously connected to a gas inlet and a gas outlet of the solid argon tank and a gas inlet of the purifier through gas pipelines; a gas outlet of the purifier is simultaneously connected to gas inlets of the vacuum pump set, the liquid argon tank and the solid argon tank through gas pipelines; a heating resistor is also arranged in the liquid argon tank and is used for gasifying liquid argon; and a gas outlet of the liquid argon tank is connected to a gas inlet of the solid argon tank through the gasification coil pipe and the circulating p