Composite multilayer film for secondary electron emission and preparation method thereof

The invention belongs to the technical field of vacuum electronic devices and materials, and relates to a composite multilayer thin film for secondary electron emission, which is formed by arranging and combining basic stacking structures formed by different functional layers in a cyclic stacking ma...

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Bibliographische Detailangaben
Hauptverfasser: SU YUE, WU SHENGLI, CHU XUMING, HU WENBO, LI JIE, YUN XINTUAN
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention belongs to the technical field of vacuum electronic devices and materials, and relates to a composite multilayer thin film for secondary electron emission, which is formed by arranging and combining basic stacking structures formed by different functional layers in a cyclic stacking manner, and realizes interface correction and optimal energy band arrangement. The invention also discloses a preparation method, which comprises the following steps of: mounting a cleaned substrate on a substrate frame, and depositing different functional layers to obtain a first basic stacking structure; and then carrying out cyclic stacking according to the deposition sequence of the basic stacking structure, and finally obtaining the composite multilayer film for secondary electron emission. Compared with a traditional gold-doped magnesium oxide thin film, the conductivity of the composite thin film is further improved, large attenuation of a secondary electron emission coefficient caused by charge accumulation u