Methacrylate copolymers and methods of making and using same
Described herein is a methacrylate copolymer derived from: a (meth) acrylate monomer comprising a second terminal olefin group; an alkyl methacrylate monomer, wherein the alkyl group comprises from 1 to 4 carbon atoms; a mono (meth) acrylate monomer comprising a low surface energy group, wherein the...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | Described herein is a methacrylate copolymer derived from: a (meth) acrylate monomer comprising a second terminal olefin group; an alkyl methacrylate monomer, wherein the alkyl group comprises from 1 to 4 carbon atoms; a mono (meth) acrylate monomer comprising a low surface energy group, wherein the low surface energy group comprises a perfluoroalkyl group, a perfluoropolyether group, or a siloxane group; and a RAFT agent. Such copolymers can be used to prepare liquid compositions, which can then be used to create molds for nanoimprint or transfer lithography.
本文说明了一种甲基丙烯酸酯共聚物,该甲基丙烯酸酯共聚物源自:包含第二末端烯烃基团的(甲基)丙烯酸酯单体;甲基丙烯酸烷基酯单体,其中烷基基团包含1至4个碳原子;包含低表面能基团的单(甲基)丙烯酸酯单体,其中该低表面能基团包括全氟烷基基团、全氟聚醚基团或硅氧烷基团;和RAFT剂。此类共聚物可用于制备液体组合物,该液体组合物随后可用于产生用于纳米压印或转移光刻的模具。 |
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