Thermo-optical phase shifter and electronic equipment
The invention discloses a thermo-optical phase shifter and electronic equipment. The thermo-optical phase shifter comprises a first waveguide array layer, a second waveguide array layer, a plurality of bent waveguides, a phase shifting region and a heating electrode, the first waveguide array layer...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a thermo-optical phase shifter and electronic equipment. The thermo-optical phase shifter comprises a first waveguide array layer, a second waveguide array layer, a plurality of bent waveguides, a phase shifting region and a heating electrode, the first waveguide array layer and the second waveguide array layer are arranged in a crossed manner and are communicated in series through a bent waveguide; the phase shift region is in a region enclosed by the first waveguide array layer and the second waveguide array layer; the heating electrode is arranged in the phase shift area and heats the waveguide in the phase shift area to complete phase change. According to the thermo-optic phase shifter, the integration level of the waveguide is remarkably increased by adopting the arrangement mode that the first waveguide array layer and the second waveguide array layer are arranged in a crossed mode, so that the effective length of the heated waveguide in the unit area is increased, the heat utili |
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