Method for manufacturing optical filter with F-P cavity structure, optical filter array and optical filter structure

A method of manufacturing a plurality of optical filters having Fobrit-Purl cavity structures includes providing a carrier. A first reflective layer is disposed on the carrier. A first optical pattern layer and a second optical pattern layer are arranged on the surface of the first reflecting layer, the first optical pattern layer is provided with a plurality of first nanostructures, and the second optical pattern layer is provided with a plurality of second nanostructures; and reflowing the first optical pattern layer and the second optical pattern layer to respectively form a first film layer and a second film layer. Coating a second reflecting layer on the first film layer and the second film layer; the invention further provides a multispectral transmission optical filter array and a multispectral transmission optical filter structure. 一种制造多个具有法布立-培若腔结构的滤光片的方法，包括设置载体。设置第一反射层于载体上。设置第一光学图案层及第二光学图案层在第一反射层的表面上，第一光学图案层具有多个第一纳米结构，第二光学图案层具有多个第二纳米结构。回流第一光学图案层及第二光学图案层，分别形成第一膜层及第二膜层。涂覆第二反射层于第一膜层及第二膜层上。本发明还提出一种多光谱透射