Chip quality inspection liquid path system, chip quality inspection device and chip quality inspection method

The invention provides a chip quality inspection liquid path system, a chip quality inspection device and a chip quality inspection method. The chip quality inspection liquid path system comprises a reagent container, a chip bearing module, a sample collecting pipe set, an injection pump assembly an...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHANG TAO, PI DING, HUANG PINKE, LIAO TINGCONG, DENG GUOQING, WANG MINGYUE, LU CAIRUI, LI SONG, ZHAI WENPING
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a chip quality inspection liquid path system, a chip quality inspection device and a chip quality inspection method. The chip quality inspection liquid path system comprises a reagent container, a chip bearing module, a sample collecting pipe set, an injection pump assembly and a three-way pipeline, and the inlet end of the chip bearing module is communicated with the reagent container; the sample collection tube group is used for collecting the to-be-detected reagent flowing through the chip bearing module; the injection pump assembly is communicated with the outlet end of the chip bearing module; the first end of the three-way pipeline is communicated with the outlet end of the chip bearing module, the second end of the three-way pipeline is communicated with the sample collecting pipe group, and the third end of the three-way pipeline is communicated with the injection pump assembly; when a to-be-detected reagent is collected through the sample collection pipe set, the second end is