Pressure sensor based on stress concentration effect and preparation method thereof

The invention provides a pressure sensor based on a stress concentration effect and a preparation method thereof, and relates to the technical field of sensors. The pressure sensor comprises a first electrode layer, a friction layer, a second electrode layer and a stress concentration layer which ar...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: LYU YANGYANG, LIU YINA, XIE LINGJIE, WEN ZHEN, JIANG GUYU, HOU JIAXUN
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!