Pressure sensor based on stress concentration effect and preparation method thereof
The invention provides a pressure sensor based on a stress concentration effect and a preparation method thereof, and relates to the technical field of sensors. The pressure sensor comprises a first electrode layer, a friction layer, a second electrode layer and a stress concentration layer which ar...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention provides a pressure sensor based on a stress concentration effect and a preparation method thereof, and relates to the technical field of sensors. The pressure sensor comprises a first electrode layer, a friction layer, a second electrode layer and a stress concentration layer which are sequentially arranged from top to bottom, the friction layer comprises a friction part, the friction part and the first electrode layer are spaced by a preset distance, the stress concentration layer comprises a plurality of first conical microstructures, and the tips of the first conical microstructures are arranged to be away from the second electrode layer. The Young modulus of the stress concentration layer is a first preset value, and the first preset value is any one value in the range of 700-1300kPa, so that the pressure sensor with different Young modulus stress concentration layers is prepared, the sensitivity of the pressure sensor is improved, and the detection range of the pressure sensor is enlarged. |
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