Silicon material re-feeding method for prolonging single-furnace operation time of single crystal furnace

The invention provides a silicon material re-feeding method for prolonging the operation time of a single furnace of a single crystal furnace, which comprises the following steps: continuously re-feeding a plurality of cylinders of silicon materials, re-feeding each cylinder of silicon material comp...

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Bibliographische Detailangaben
Hauptverfasser: YANG CHAO, FANG YING, YAN YUFENG, LIU HAO, SONG KERAN
Format: Patent
Sprache:chi ; eng
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