Adsorption separation device for air and organic fluoride liquid steam

The air and organic fluoride liquid vapor adsorption separation device provided by the embodiment of the invention comprises adsorption towers, adsorption towers and a separation tower, an adsorbent is accommodated in each adsorption tower, the adsorbent adopts a zeolite molecular sieve, and the pore diameter of the zeolite molecular sieve is determined according to the relative size of the dynamic diameters of nitrogen and oxygen molecules and fluoride liquid molecules; the vacuumizing branch is connected with the gas inlet of the adsorption tower and is used for vacuumizing the adsorption tower; the pressurizing branch is connected with a gas inlet of the adsorption tower and is used for conveying mixed gas of air and organic fluoride liquid steam into the vacuumized adsorption tower; and the recovery branch is connected with the gas outlet of the adsorption tower and is used for collecting the organic fluoride liquid steam which is discharged from the absorption tower and meets the purity requirement. The