Manufacturing method of curved surface microstructure flexible pressure sensor

The invention discloses a method for manufacturing a curved surface microstructure flexible pressure sensor, which comprises the following steps of: firstly, manufacturing a primary microstructure film with a plurality of hemispherical film structures, and then pre-stretching to enable the plurality...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YANG CHAO, FU HAORAN, LU YITING, ZHANG HAOYU, BIAN XUECHENG, TU XIA, JIANG JIANQUN, ZHAO ZHEHUI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a method for manufacturing a curved surface microstructure flexible pressure sensor, which comprises the following steps of: firstly, manufacturing a primary microstructure film with a plurality of hemispherical film structures, and then pre-stretching to enable the plurality of hemispherical film structures on the primary microstructure film to be stretched into plane structures to obtain a pre-stretched film; the method comprises the following steps: preparing a pre-stretching film on a substrate film, preparing a plurality of secondary microstructure bulges on each part of the pre-stretching film which is stretched into a plane structure, releasing the pre-stretching stress of the pre-stretching film to form a secondary microstructure film, and compounding the secondary microstructure film and the substrate film into an integrated structure to obtain the secondary microstructure conductive compound film. Finally, the curved surface microstructure flexible pressure sensor is composed