DISCHARGE APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND ARTICLE MANUFACTURING METHOD

The invention provides a discharge apparatus, a substrate processing apparatus, and an article manufacturing method. The processing unit supplies first selection information for selecting first waveform information among the plurality of pieces of waveform information to the drive circuit, drives th...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	INOMATA YUYA
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CORRECTION OF TYPOGRAPHICAL ERRORS i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME LINING MACHINES PERFORMING OPERATIONS PRINTING SELECTIVE PRINTING MECHANISMS STAMPS TRANSPORTING TYPEWRITERS
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