Organic solvent supply apparatus, substrate processing method, and substrate processing apparatus

The invention relates to an organic solvent supply apparatus, a substrate processing method, and a substrate processing apparatus. According to the present invention, provided is an organic solvent supply apparatus, in a substrate processing apparatus including a liquid processing chamber for supplying an organic solvent to a substrate and a supercritical processing chamber for performing supercritical drying processing on the substrate coated with the organic solvent, the organic solvent is supplied to the liquid processing chamber. This organic solvent supply device is provided with: a supply tank for storing an organic solvent; a supply line connected to the supply tank and the liquid processing chamber; and a cooling module disposed on the supply line. 本发明涉及有机溶剂供应装置、基板处理方法、基板处理装置。根据本发明提供一种有机溶剂供应装置，在包括向基板供应有机溶剂的液处理腔室以及将涂布有有机溶剂的基板进行超临界干燥处理的超临界处理腔室的基板处理装置中，向所述液处理腔室供应所述有机溶剂。有机溶剂供应装置包括：供应罐，保管有机溶剂；供应线，连接于所述供应罐和所述液处理腔室；以及冷却模组，设置于所述供应线。