Method for purifying amino silane

The invention relates to the field of electronic special gas, in particular to a purification method of amino silane, which comprises the following steps: (S.1) providing a rectifying tower, the rectifying tower comprises a tower kettle and a rectifying column, the tower kettle is filled with an adsorbent, and the rectifying column is filled with an adsorption filler; the adsorbent contains a metal oxide and an anionic polymer containing a carbonyl group; (S.2) adding the crude product amino silane into the tower kettle, so that the crude product amino silane is in contact with the adsorbent in the tower kettle; and (S.3) increasing the temperature of the tower kettle, enabling the aminosilane to flow back to be in contact with the adsorption filler in the rectifying column, and collecting fractions flowing out of the rectifying column to obtain the electronic-grade aminosilane. According to the purification method, an adsorbent and rectification combined mode is adopted, impurities in the crude product amino