Method for cleaning surface of graphite boat

The invention discloses a method for cleaning the surface of a graphite boat, which is characterized by comprising the following steps: putting the graphite boat into a cleaning solution for cleaning, the cleaning solution is prepared by mixing hydrofluoric acid, nitric acid and water according to t...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LU GUOYUN, ZHANG BO, YAO XIANBIN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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