Method for cleaning surface of graphite boat

The invention discloses a method for cleaning the surface of a graphite boat, which is characterized by comprising the following steps: putting the graphite boat into a cleaning solution for cleaning, the cleaning solution is prepared by mixing hydrofluoric acid, nitric acid and water according to t...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LU GUOYUN, ZHANG BO, YAO XIANBIN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a method for cleaning the surface of a graphite boat, which is characterized by comprising the following steps: putting the graphite boat into a cleaning solution for cleaning, the cleaning solution is prepared by mixing hydrofluoric acid, nitric acid and water according to the volume ratio of HF: HNO3: H2O = (0.9-1.1): (0.9-1.1): (2.7-3.3), the mass fraction of hydrofluoric acid stock solution is 9.9%-12.1%, and the mass fraction of nitric acid stock solution is 12.2%-15.0%; washing the surface of the graphite boat with pure water; the graphite boat is put into a pure water soaking tank to be cleaned, and meanwhile continuous bubbling operation is carried out; the graphite boat is put into a pure water soaking tank to be cleaned and overflow, and meanwhile continuous bubbling operation is conducted; the surface of the graphite boat is blow-dried, and surface moisture is removed; and the graphite boat is moved into a clean oven to be dried. By optimizing the formula of the cleaning sol