Silicon optical chip integrated with BTO electro-optical modulator and manufacturing method thereof

The invention provides a silicon optical chip integrated with a BTO electro-optical modulator and a manufacturing method of the silicon optical chip. The silicon optical chip integrated with the BTO electro-optical modulator comprises a silicon optical chip body, the BTO modulator and a coating laye...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HU HAO, LIU JUN, SHEN XIAO'AN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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