Apparatus and method for measuring showerhead assembly conductance

Methods and apparatus for measuring conductance of a showerhead assembly are described. For example, the showerhead assembly may be disposed in the housing. A gas source may be coupled to the gas inlet of the showerhead assembly and supply gas to the showerhead assembly through the gas inlet. A pressure controller may be coupled between the gas source and the showerhead assembly. The pressure controller may measure a flow rate of gas through the pressure controller. The pressure controller may maintain the gas supplied to the showerhead assembly at a first pressure value. A pressure sensor coupled to an exhaust port of the showerhead assembly may measure a second pressure value. The controller may determine a conductance of the showerhead assembly based on the flow rate and the first and second pressure values. 描述了用于测量喷淋头组件的流导的方法和装置。例如，喷淋头组件可以安置在外壳中。气体源可以联接到喷淋头组件的进气口，并通过进气口向喷淋头组件供应气体。压力控制器可以联接在气体源和喷淋头组件之间。压力控制器可以测量通过压力控制器的气体的流量。压力控制器可以将供应给喷淋头组件的气体保持在第一压力值。联接到喷淋头组件的排气口的压力传感器可以测量第二压力值。控制器可以基于流量以及第一和第二压力值来确定喷淋头组