Semiconductor manufacturing apparatus, tool jig mounting method, and semiconductor device manufacturing method

The invention provides a technology capable of preventing a tool clamp which does not correspond to a product from being installed. The semiconductor manufacturing apparatus includes: a tool jig having a label; a bare chip processing unit, wherein the tool clamp can be installed on the bare chip pro...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NAKUI YUKI, SAITO AKIRA, MOCHIZUKI MASAYUKI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CALCULATING COMPUTING COUNTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING RECORD CARRIERS PHYSICS PRESENTATION OF DATA RECOGNITION OF DATA RECORD CARRIERS SEMICONDUCTOR DEVICES
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