Detection system for adjustable/replaceable edge coupling ring

A substrate processing system includes a processing chamber. A susceptor is arranged in the process chamber. An edge coupling ring is disposed adjacent the base and around a radially outer edge of the substrate. The actuator is configured to selectively move the edge coupling ring relative to the su...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GENETTI DAMON TYRONE, WANG YUHOU, MCCHESNEY JON, PATERSON ALEXANDER
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS SEMICONDUCTOR DEVICES TESTING
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