Detection system for adjustable/replaceable edge coupling ring

A substrate processing system includes a processing chamber. A susceptor is arranged in the process chamber. An edge coupling ring is disposed adjacent the base and around a radially outer edge of the substrate. The actuator is configured to selectively move the edge coupling ring relative to the substrate to change an edge coupling profile of the edge coupling ring. The substrate processing system includes a camera-based detection system that instructs the actuator to adjust the position of the edge coupling ring. The camera is configured to communicate with the controller, and the controller adjusts a position and/or focus of the camera. In response to edge coupling ring condition information from the camera, the controller operates the actuator to vertically move the edge coupling ring. In response to edge coupling ring position information from the camera, the controller operates the actuator to horizontally move the edge coupling ring. 一种衬底处理系统包括处理室。在处理室中布置有基座。边缘耦合环被布置成邻近基座并且围绕衬底的径向外边缘。致动器配置成相对于衬底选择性地移动边