High-sensitivity micro-capacitance detection device

The invention discloses a high-sensitivity micro-capacitance detection device. The device comprises a capacitive displacement sensor probe and a micro capacitance detection device. The capacitive displacement sensor probe is used for converting the distance to be measured between the probe and a measured object and the variable quantity into a capacitance value and a capacitance variable quantity; and the micro capacitance detection device is used for detecting the micro capacitance value and the variable quantity of the capacitive displacement sensor probe and converting the capacitance value and the variable quantity into direct current for outputting. The micro capacitance detection device comprises a power supply and voltage reference generation module, a micro capacitance detection core circuit module, an excitation signal generation module, a pre-conditioning circuit module, a lock-in amplification module, a multi-order low-pass filtering module and a gain and zero adjustment module. According to the in