Method for preparing high-purity halide wet electronic chemicals by adopting sub-boiling distillation method

The invention discloses a method for preparing high-purity halide wet electronic chemicals by adopting an approximate sub-boiling distillation method, which belongs to the technical field of wet electronic chemicals and comprises the following steps: (1) feeding industrial-grade liquid halogen hydride from the middle lower part of a sub-boiling distiller, and feeding circulating water serving as a heat source into an outer heating jacket of the sub-boiling distiller; industrial-grade liquid hydrogen halide is in a sub-boiling state in the sub-boiling distiller, liquid-phase hydrogen halide does not rise along the wall of the sub-boiling distiller, and hydrogen halide gas is discharged from the top of the sub-boiling distiller and enters the first-stage falling film absorber after pressure reduction; discharging residual materials from a tower kettle of the sub-boiling distiller; (2) the hydrogen chloride gas which is not absorbed by the first-stage falling film absorber sequentially enters a second-stage fall