Preparation method of ceramic ESC with heating function

The invention discloses a preparation method of a ceramic ESC with a heating function. Comprising the following steps: S1, preparing aluminum oxide powder into slurry for tape casting; s2, a casting material belt blank body flows out through a casting machine; s3, cutting the casting material strip blank body into sheets; s4, punching one or more hole sites in the sheet stock; s5, preparing the printing paste into a prepared material; s6, all the blanks are attached together in a lamination mode, and a thick ceramic plate green body sheet is prepared; s7, a heating wire is attached to the middle of the ceramic plate blank; and S8, pressing the heating wire and the ceramic plate blank together through an isostatic pressing process to prepare the ESC. Through the improved design, the etching service life of a high-process product can be greatly prolonged, and the etching efficiency, the temperature uniformity and the process stability are greatly improved. 本发明公开了陶瓷自带发热功能ESC制备方法。包括以下步骤：S1、将氧化铝粉制备成可供流延浆料；S2、通过流延机