VALVE FOR SEMICONDUCTOR DEVICE

A valve includes a valve body including an inlet, an outlet, and a mounting surface. And a first valve actuator connected to the valve body. And a plurality of mounting holes formed in the mounting surface. The plurality of mounting holes are asymmetric with respect to the mounting surface. 包括包含入口、出...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WILTSE JOHN MICHAEL, LUO BIN, RATLEEF BRIAN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:A valve includes a valve body including an inlet, an outlet, and a mounting surface. And a first valve actuator connected to the valve body. And a plurality of mounting holes formed in the mounting surface. The plurality of mounting holes are asymmetric with respect to the mounting surface. 包括包含入口、出口、以及安装表面的阀体的阀。连接至该阀体的第一阀致动器。形成在该安装表面中的多个安装孔。该多个安装孔相对于该安装表面是不对称的。