MEMS atmospheric electric field sensor and assembling method thereof

The invention provides an MEMS atmospheric electric field sensor and an assembling method thereof, and relates to the technical field of sensors. A first groove facing the top of the conductive shell is formed in the bottom of the conductive shell. The conductive part is arranged in the first groove; the insulating part is arranged in the first groove and is fixed at the bottom of the conductive part; at least one part of the middle cylinder part is arranged in the first groove and is arranged at the bottom of the insulating part, a first inner cavity is formed in the middle cylinder part, and the first inner cavity is filled with an adhesive; the MEMS electric field measurement module is vertically clamped in the first inner cavity and wrapped by the adhesive, the MEMS electric field measurement module comprises a wire connected with the MEMS electric field measurement module, and the top end of the wire sequentially penetrates through the middle cylinder component and the insulating component and then is co